Blank Cover Image

Instability formation in epitaxial SiGe lines under hydrogen annealing

Author(s):
Publication title:
Nanostructured semiconductors and nanotechnology : symposium held April 1-5, 2013, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1551
Pub. Year:
2014
Page(from):
87
Page(to):
94
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605115283 [1605115282]
Language:
English
Call no.:
M23500/1551
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Photoluminescence of Selectively Grown Epitaxial SiGe:C/Si layers

J. Bouvier, G. Bremond, B. Vandelle, F. Brossard, D. Dutartre

Electrochemical Society
7 Conference Proceedings Non-melt Laser Thermal Annealing of Shallow Boron Implantation for Back Surface Passivation of Backside-illuminated CMOS Image Sensors

Zahra Ait Fqir Ali-Guerry, Karim Huet, Didier Dutartre, Rémi Beneyton, Daniel Bensahel, Philippe Normandon, Guo-Neng Lu

Materials Research Society
2 Conference Proceedings Defect Characterization in P Isotype Si/SiGe/Si Heterostructures by Space Charge Spectroscopy

Bremond,G., Souifi,A., Degroodt,P., Warren,P., Dutartre,D., Guillot,G.

Trans Tech Publications
8 Conference Proceedings Silicon Etching Study in a RT-CVD Reactor With the HCl/H2 Gas Mixture

Nicolas Loubet, Alexandre Talbot, Didier Dutartre

Materials Research Society
3 Conference Proceedings Modeling Dopant Diffusion in SiGe and SiGeC Alloys

Pakfar, Ardechir, Holliger, Philippe, Poncet, Alain, Fellous, Cyril, Dutartre, Didier, Schwartzmann, Thieny, Jaouen, …

Materials Research Society
9 Conference Proceedings RELAXATION DEFECT CHARACTERIZATION OF RTCVD Si1-XGeX/Si HETEROSTRUCTURES BY ELECTRICAL AND OPTICAL TECHNIQUES

Souifi, A., Bremond, G., Benyattou, T., Guillot, G., Dutartre, D.

Materials Research Society
4 Conference Proceedings Modeling Dopant Diffusion in SiGe and SiGeC Alloys

Pakfar, Ardechir, Holliger, Philippe, Poncet, Alain, Fellous, Cyril, Dutartre, Didier, Schwartzmann, Thierry, Jaouen, …

Materials Research Society
10 Conference Proceedings Carbon Incorporation in SiGe Epi Films to Block Boron Diffusion

F. Deleglise, D. Dutartre, A. Talbot

Electrochemical Society
5 Conference Proceedings (8.5) 5:35 - 5:55 PM - Investigation of Facet Formation in RTCVD Si/SiGe Selective Epitaxy

Talbot, A., Arcamone, J., Fellous, C., Deleglise,　F., Dutartre, D. (STMicroelectronics)

Electrochemical Society
11 Conference Proceedings A COMPARISON OF TWO EPITAXIAL FORMATION MECHANISMS IN THE SiGe SYSTEM

Prokes, S. M., Rai, A. K.

MRS - Materials Research Society
6 Conference Proceedings Facet Propagation in Si and SiGe Epitaxy or Etching

D. Dutartre, A. Talbot, N. Loubet

Electrochemical Society
12 Conference Proceedings Epitaxial nickel disilicide formation by electron beam annealing

Harper, R. E., Maydell-Ondrusz, E. A., Wilson, I. H., Stephens, K. G.

North-Holland
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12