Effects of Substrate Cooling on the Ionic Conductivity of Ta2O5 Solid-Electrolyte Thin Films Prepared by Reactive Sputtering Using H2O Gas

Effects of Substrate Cooling on the Ionic Conductivity of Ta₂O₅ Solid-Electrolyte Thin Films Prepared by Reactive Sputtering Using H₂O Gas

Author(s):

Publication title:

Ionic and Mixed Conducting Ceramics 6

Title of ser.:

ECS transactions

Ser. no.:

13(26)

Pub. Year:

2008

Page(from):

55

Page(to):

60

Pages:

6

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

19385862

ISBN:

9781615672851 [1615672850]

Language:

English

Call no.:

E23400/13-26 [26]

Type:

Conference Proceedings

Details

TDL ID:	ZA00013252
Series ID:	PA00000034
Conf. info. (Name):	ECS Meeting
Conf. info. (Number):	213th
Conf. info. (Venue):	Phoenix, AZ, USA
Conf. info. (Date):	2008.05.18-2008.05.23
Note for article:	213th ECS Meeting, May 18 - May 23, 2008, Phoenix, AZ

Similar Items:

1 Conference Proceedings Formation Process of Reactively Sputtered MoO3 Thin Films and Their Optical Properties. Abe, Y., Imamura, H., Washizu, E., Sasaki, K. Electrochemical Society	7 Conference Proceedings Rapid Epitaxial Growth of Si and SiGe Mono-Crystalline Films on Silicon-on-Glass Substrates by Reactive CVD Using SiH₄, GeH₄, and … Hiroshi Noge, Akira Okada, Ta-Ko Chuang, J. Greg Couillard, Michio Kondo Materials Research Society
2 Conference Proceedings Thermal Stability and Electrical Properties of RhO2 Thin Films Abe, Yoshio, Kato, Kiyohiko, Kawamura, Midori, Sasaki, Katsutaka Materials Research Society	8 Conference Proceedings Ferroelectric properties of multi-layer LiTaO₃ thin films with Ta₂O₅ buffer D.-Y. Zhang, W.-D. Peng, J.-H. Li, K. Li, D.-G. Huang Society of Photo-optical Instrumentation Engineers
3 Conference Proceedings Structure Stability and Mechanical Property of Y₂O₃ Thin Films Deposited by Reactive Magnetron Sputtering P.F. Yu, K. Zhang, S.X. Du, P. Ren, M. Wen, W.T. Zheng Trans Tech Publications	9 Conference Proceedings Comparison of TiN Thin Films Grown on SiO₂ by Reactive dc Magnetron Sputtering and High Power Impulse Magnetron Sputtering F. Magnus, A. S. Ingason, O. B. Sveinsson, S. Olafsson, J. T. Gudmundsson Materials Research Society
4 Conference Proceedings Effects of LiClO₄ on the Characteristics and Ionic Conductivity of the Solid Polymer Electrolytes Composed of PEO, LiClO₄ and PLiAA R. Yang, S.C. Zhang, L. Zhang, X.F. Bi Trans Tech Publications	10 Conference Proceedings Reactive Sputtering Deposition of Photocatalytic TiO₂ Thin Films on Glass Substrates C.J. Tavares, J. Vieira, L. Rebouta, G. Hungerford, P. Coutinho Society of Vacuum Coaters
5 Conference Proceedings Effects of Dodecanoic Acid Modified SIO₂ on Filler Dispersion and Ionic Conductivity of PMMA/ENR 50/LIBF₄ Electrolytes S.I.H. Mohd Azuan, F. Abdul Latif, S.F. Mohamad Zamri Trans Tech Publications	11 Conference Proceedings Effects of TI addiction in WO3 thin film ammonia gas sensor prepared by dc reactive magnetron sputtering [6358-36] Hu, M., Yong, C., Feng, Y., Lv, Y., Han, L., Liang, J., Wang, H. SPIE - The International Society of Optical Engineering
6 Conference Proceedings Influence of Discharge Gas Pressure on Structural Properties of SnO₂ Thin Films Deposited by Reactive Magnetron Sputtering Shen, Yan Bai, Wei, De Zhou, Liu, Wen Gang, Gao, Shu Ling, Cui, Bao Yu Trans Tech Publications	12 Conference Proceedings Photoelectrochemical behaviors of Pt/TiO2 nanocomposite thin film electrodes prepared by PLD/Sputtering combined system Sasaki, Takeshi, Nichols, William T., Yoon, Jong-Won, Koshizaki, Naoto Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12