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Modeling of Thermodynamic and Transport Phenomena in CVD Processes for Nano-Scale Applications

Author(s):
Publication title:
Thermal and Plasma CVD of Nanostructures
Title of ser.:
ECS transactions
Ser. no.:
13(9)
Pub. Year:
2008
Page(from):
7
Page(to):
18
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781605606477 [1605606472]
Language:
English
Call no.:
E23400/13-4 [9]
Type:
Conference Proceedings

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