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Silicide and Germanide Technology for Contacts and Metal Gates in MOSFET Applications

Author(s):
Publication title:
ULSI process integration 5
Title of ser.:
ECS transactions
Ser. no.:
11(6)
Pub. Year:
2007
Page(from):
197
Page(to):
205
Pages:
9
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775724 [1566775728]
Language:
English
Call no.:
E23400/11-6
Type:
Conference Proceedings

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