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Analysis of the Pre-epi Bake Conditions on the Defect Creation in Recessed SiGe S/D Junctions

Author(s):
Publication title:
Analytical and diagnostic techniques for semiconductor materials, devices and processes 7
Title of ser.:
ECS transactions
Ser. no.:
11(3)
Pub. Year:
2007
Page(from):
47
Page(to):
53
Pages:
7
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775694 [1566775698]
Language:
English
Call no.:
E23400/11-3
Type:
Conference Proceedings

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