The Effect of Delay Between Dry Etch and Wet Clean Processing Steps on Cleaning of Post-Etch Residues
- Author(s):
- Publication title:
- Cleaning and surface conditioning technology in semiconductor device manufacturing 10
- Title of ser.:
- ECS transactions
- Ser. no.:
- 11(2)
- Pub. Year:
- 2007
- Page(from):
- 283
- Page(to):
- 290
- Pages:
- 8
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566775687 [156677568X]
- Language:
- English
- Call no.:
- E23400/11-2
- Type:
- Conference Proceedings
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