Mechanism Design of Rotational Magnetic Assistance Electrochemical Finishing on Freeform Surface | 東京工業大学附属図書館文献データベース

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Mechanism Design of Rotational Magnetic Assistance Electrochemical Finishing on Freeform Surface

Author(s):: P. Pa
Publication title:: Microelectonics Technology and Devices - SBMicro 2008
Title of ser.:: ECS transactions
Ser. no.:: 14(1)
Pub. Year:: 2008
Page(from):: 629
Page(to):: 640
Pages:: 12
Pub. info.:: Pennington, N.J.: Electrochemical Society
ISSN:: 19385862
ISBN:: 9781566776462 [1566776465]
Language:: English
Call no.:: E23400/14-1
Type:: Conference Proceedings

Details

TDL ID:	ZA00013290
Series ID:	PA00000034
Conf. info. (Name):	Symposium on Microelectronics Technology and Devices
Conf. info. (Number):	23rd
Conf. info. (Venue):	Gramado, Brazil
Conf. info. (Date):	2008.09.01-2008.09.04
Note for article:	23rd Symposium on Microelectronics Technology and Devices, September 1 - September 4, 2008, Gramado, Brazil

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