Fabrication of Multi-point Test Structures Using Focused Ion Beam and Selective Carbon Nanotubes Deposition by Dielectrophoresis

Fabrication of Multi-point Test Structures Using Focused Ion Beam and Selective Carbon Nanotubes Deposition by Dielectrophoresis

Author(s):

Publication title:

Microelectonics Technology and Devices - SBMicro 2008

Title of ser.:

ECS transactions

Ser. no.:

14(1)

Pub. Year:

2008

Page(from):

473

Page(to):

475

Pages:

3

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

19385862

ISBN:

9781566776462 [1566776465]

Language:

English

Call no.:

E23400/14-1

Type:

Conference Proceedings

Details

TDL ID:	ZA00013290
Series ID:	PA00000034
Conf. info. (Name):	Symposium on Microelectronics Technology and Devices
Conf. info. (Number):	23rd
Conf. info. (Venue):	Gramado, Brazil
Conf. info. (Date):	2008.09.01-2008.09.04
Note for article:	23rd Symposium on Microelectronics Technology and Devices, September 1 - September 4, 2008, Gramado, Brazil

Similar Items:

1 Conference Proceedings Electrical Characterization of Multi-Walled Carbon Nanotubes in 2 and 4 Terminals Configurations J. Leon, S.A. Moshkalev, A. Flacker, A. Vaz, C. Veríssimo Electrochemical Society	7 Conference Proceedings Synthesis of Carbon Nanotubes by Plasma-Enhanced Chemical Vapor Deposition Moshkalyov, S.A., Reyes-Betanzo, C., Swart, J.W., Ramos, A.C.S. Electrochemical Society
2 Conference Proceedings The Influence of Substrates on the Carbon Nanotube Growth Process M. R. de Aguiar, C. Verissimo, S. A. Moshkalev, J. W. Swart Electrochemical Society	8 Conference Proceedings Controlled Deposition of Carbon Nanotubes by Dielectrophoresis for Micro and Nanodevices Jorge Augusto León Eras, Mario Antonio Bica De Moraes, Carla Veríssimo, Stanislav Moshlralyov Electrochemical Society
3 Conference Proceedings Contact Improvement for Carbon Nanotubes Deposited by Dielectrophoresis J. Leon, A. R. Vaz, A. Flacker, S. A. Moshkalev, M. B. de Moraes, J. W. Swart Electrochemical Society	9 Conference Proceedings Growth of Carbon Nanostructures by Thermal Chemical Vapor Deposition via Metal Catalysis Verissimo, C., Moshkalyov, S. A., Ramos, A. C. S., Goncalves, J. L., Swart, J. W. Electrochemical Society
4 Conference Proceedings Electrical Characterization of Platinum Thin Films Deposited by Focused Ion Beam M. M. da Stiva, A. R. Vaz, S. A. Moshkalev, J. W. Swart Electrochemical Society	10 Conference Proceedings Study of the alignment of multiwalled carbon nanotubes using dielectrophoresis C. Zhang, M. Breedon, W. Wlodarski, K. Kalantar-zadeh Society of Photo-optical Instrumentation Engineers
5 Conference Proceedings Study of Carbon Nanotubes Growth by Atmospheric Pressure Chemical Vapor Deposition Verissimo, C., Moshkalyov, S. A., Ramos, A. C. S., Goncalves, J. L., Leon, J., Swart, J. W. Electrochemical Society	11 Conference Proceedings Selective Silicon Nitride Etching by ECR Plasmas Using SF6 and NF3 Based Gas Mixtures Reyes-Betanzo, C., Moshkalyov, S.A., Swart, J.W., Ramos, A.C.S. Electrochemical Society
6 Conference Proceedings Fabrication of Submicron Structures in Polycristalline Silicon by Reactive Ion Etching Using Fluorine- and Chlorine- Containing Plasmas Reyes-Betanzo, C., Moshkalyov, S.A., Seabra, A.C., Swart, J.W. Electrochemical Society	12 Conference Proceedings Focused Ion Beam Fabrication of Individual Carbon Nanotube Devices Lee Chow, Guangyu Chai Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12