Blank Cover Image

Post-Silicidation Annealing Effects on Electrical and Structural Properties of NiPt Germanosilicide

Author(s):
Publication title:
Microelectonics Technology and Devices - SBMicro 2008
Title of ser.:
ECS transactions
Ser. no.:
14(1)
Pub. Year:
2008
Page(from):
385
Page(to):
393
Pages:
9
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566776462 [1566776465]
Language:
English
Call no.:
E23400/14-1
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Electrical and Mechanical Properties of Post-Annealed SiCxNy Films

M.A. Fraga, M. Massi, I.C. Oliveira, N.C. Cruz, S.G. Dos Santos Filho

Trans Tech Publications
7 Conference Proceedings Formation and Stability of Ni(Pt)Si/Poly-Si Layered Structure

Santos, R. E., Doi, I., Teixeira, R. C., Diniz, J. A., Swart, J. W., dos Santos, S. G.

Electrochemical Society
2 Conference Proceedings Formation and Characterization of the Ni(Pt)Si and NiSi for MOS Devices Applications

Santos, R.E., Doi, I., Diniz, J.A., Swan, J.W., dos Santos Filho, S.G.

Electrochemical Society
8 Conference Proceedings Electrical Characterization of Thin Gate Oxynitride Obtained by N+ Implantation into Polysilicon/ Thermal Oxide/ Silicon Structure

Toquetti, L. Z., dos Santos Filho, S. G., Diniz, J. A., Swart, J. W.

Electrochemical Society
3 Conference Proceedings Thermal Stability of Ni/Pt Silicide Films on BF Doped and Undoped (100)Si

Santos, R. E., Doi, I., Hayashi, M.A., Diniz, J. A., DOS Santos Fo., S. G.

Electrochemical Society
9 Conference Proceedings Formation of Nickel Silicides onto As-Doped Silicon Using a Thin Pt/Pd Interlayer

Reis, R. W., dos Santos Filho, S. G., Doi, I., Swart, J. W.

Electrochemical Society
4 Conference Proceedings Characteristics of Polycrystalline Si1-xGex Alloy Deposited in a Vertical LPCVD System

Teixeira, R. C., Doi, I., Diniz, J. A., Swart, J. W., Zakia, M. B. P., dos Santos Filho, S. G.

Electrochemical Society
10 Conference Proceedings The Electrodeless Plating Mechanism of Copper onto Silicon Surfaces in Dilute Hydrofluoric Acid Solutions

dos Santos Filho, S.G., Hasenack, C.M.

Electrochemical Society
5 Conference Proceedings Formation of Nickel Silicides onto (100) Silicon Wafcr Surfaces Using a Thin Platinum Interlayer

Reis, R.W., dos Santos Filho, S.G., Doi, I., Swart, J.W.

Electrochemical Society
11 Conference Proceedings Formation of Nickel Monosilicide onto (100) Silicon Wafer Surfaces

Reis, R.W., Santos Filho, S.G., Lagana, A.A.M., Doi, I., Swart, J.W.

Electrochemical Society
6 Conference Proceedings Etching Studies of Post-Annealed SiC Films Deposited by PECVD: Influence of the Oxygen Concentration

M. A. Fraga, R. S. Pessoa, M. Massi, H. S. Maciel, S. G. dos Santos Filho

Electrochemical Society
12 Conference Proceedings Electrical and Physical Characterization of Electroless Nickel Films on Polysilicon Gate Electrodes

Navia, A.R., Santos Filho, S.G.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12