3D Simulation Software for Visualization of MEMS Microfabrication Processes
- Author(s):
- Publication title:
- Microelectonics Technology and Devices - SBMicro 2008
- Title of ser.:
- ECS transactions
- Ser. no.:
- 14(1)
- Pub. Year:
- 2008
- Page(from):
- 99
- Page(to):
- 108
- Pages:
- 10
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566776462 [1566776465]
- Language:
- English
- Call no.:
- E23400/14-1
- Type:
- Conference Proceedings
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