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Fabrication and Characterization of IC Compatible Through-Wafer Polysilicon Interconnects

Author(s):
Publication title:
Sensors, Actuators, and Microsystems (General)
Title of ser.:
ECS transactions
Ser. no.:
2(25)
Pub. Year:
2007
Page(from):
27
Page(to):
31
Pages:
5
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775366 [1566775361]
Language:
English
Call no.:
E23400/2-24 [25]
Type:
Conference Proceedings

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