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Advanced Electrochemical Processes for Sub-50 nm On-chip Metallization

Author(s):
Publication title:
Electrochemical Processing in ULSI and MEMS 2
Title of ser.:
ECS transactions
Ser. no.:
2(6)
Pub. Year:
2007
Page(from):
13
Page(to):
18
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775175 [1566775175]
Language:
English
Call no.:
E23400/2-6
Type:
Conference Proceedings

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