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MEMS Capacitive Switch Fabrication using Photodefinable Metal Oxide Dielectrics

Author(s):
Publication title:
Chemical Sensors 7 and MEMS/NEMS 7
Title of ser.:
ECS transactions
Ser. no.:
3(10)
Pub. Year:
2006
Page(from):
367
Page(to):
374
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775106 [1566775108]
Language:
English
Call no.:
E23400/3-10
Type:
Conference Proceedings

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