Alumina Porous Membranes Obtained by One-Step Anodizing Process in H2SO4 for MEMS Packaging

Alumina Porous Membranes Obtained by One-Step Anodizing Process in H₂SO₄ for MEMS Packaging

Author(s):

Publication title:

Nanostructured Metal Oxides : Processing and Applications

Title of ser.:

ECS transactions

Ser. no.:

3(9)

Pub. Year:

2006

Page(from):

75

Page(to):

83

Pages:

9

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

19385862

ISBN:

9781566775090 [1566775094]

Language:

English

Call no.:

E23400/3-9

Type:

Conference Proceedings

Details

TDL ID:	ZA00047117
Series ID:	PA00000034
Conf. info. (Name):	Symposium on Nanostructured Metal Oxides ; Meeting of the Electrochemical Society
Conf. info. (Number):	2006 ; 210th
Conf. info. (Venue):	Cancun, Mexico
Conf. info. (Date):	2006.10.29-2006.11.03
Note for article:	210th ECS Meeting, October 29-November 3, 2006, Cancun, Mexico

Similar Items:

1 Conference Proceedings Effect of deposition parameters on the stress gradient of CVD and PECVD poly-SiGe for MEMS applications Van der Donck, T., Proost, J., Rusu, C., Baert, K., Van Hoof, C., Celis, J.-P., Witvrouw, A. SPIE - The International Society of Optical Engineering	7 Conference Proceedings Vertically-Aligned MeAPO4-5 Crystals Grown on Anodic Alumina Membrane Chao, K. J., Wu, C. N., Shih, H. C., Tsai, T. G., Chiou, Y. H. Elsevier
2 Conference Proceedings Characterization of (near) hermetic zero-level packages for MEMS (Invited Paper) De Moor, P., Baert, K., De Wolf, L., Jourdain, A., Tilman, H.A.C., Witvrouw, A., Van Hoof, C.A. SPIE - The International Society of Optical Engineering	8 Conference Proceedings Hermetically Sealed On-Chip Packaging of MEMS Devices De Moor, P., Tilmans, H., Van de Peer, M., Labie, R., Beerten, S., Beyne, E., Van Hoof, C. ESA Publications Division
3 Conference Proceedings A Novel Gap Narrowing Process for Creating High Aspect Ratio Transduction Gaps for MEM HF Resonators Steve Stoffels, George Bryce, Rita Van Hoof, Bert Du Bois, Robert Mertens, Robert Puers, Harrie A.C. Tilmans, Ann … Materials Research Society	9 Conference Proceedings Influence of Yb₂O₃ and Y₂O₃ on the Mechanical Properties of Porous Si₃N₄ Ceramics C.B. Cheng, R.H. Fan, F.T. Liu, C.H. Wang, H.S. Wang Trans Tech Publications
4 Conference Proceedings Comparison between wet HF etching and vapor HF etching for sacrificial oxide removal Witvrouw,A., Bois,B.Du, Moor,P.De, Verbist,A., Hoof,C.A.Van, Bender,H., Baert,K. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Electrodeposition of Ni and Ni-Cu Nanowires in Rectified Porous Anodic Alumina Membrane Y. Zuo, J. Tang, X.T. Li, Y. Zhao, H.L. Gong Trans Tech Publications
5 Conference Proceedings Leveling of Microvias by Electroplating for Wafer Level Packaging O. Luehn, J. Celis, C. Van Hoof, K. Baert, W. Ruythooren Electrochemical Society	11 Conference Proceedings Evaluation of Structural and Morphological Characteristics of the System Ni_1-xZn_xFe₂O₄ Obtained by Combustion … A. do N.S. Braga, A.C. Gomes Filho, L.S. Neiva, T.R. Silva, J.B.L. Oliveira Trans Tech Publications
6 Conference Proceedings Effects of HTCA on Microstructure and Surface Morphology of Porous Anodic Alumina Membrane W.J. Zhang, Y.K. Le, H. Wang, B. Ou, J.W. Mao, J.P. Zhang Trans Tech Publications	12 Conference Proceedings Fabrication and Characterization of Highly Ordered Porous Alumina Templates by a Two-Step Anodization Process C.A. León-Patiño, E.A. Aguilar-Reyes, C. Ruiz-Aguilar Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12