The Properties of Al2O3 Films Deposited onto Al2O3-TiC and Si Substrates by RF Diode Sputtering

The Properties of Al₂O₃ Films Deposited onto Al₂O₃-TiC and Si Substrates by RF Diode Sputtering

Author(s):

Publication title:

Machinery electronics and control engineering II : selected, peer reviewed papers from the 2012 2nd International Conference on Machinery Electronics and Control Engineering (ICMECE 2012), Jinan, Shandong, China, 29-30 December 2012

Title of ser.:

Applied mechanics and materials

Ser. no.:

313-314

Pub. Year:

2013

Vol.:

1

Page(from):

126

Page(to):

130

Pages:

5

Pub. info.:

Stafa-Zuerich: Trans Tech Publications

ISSN:

16609336

ISBN:

9781627487191 [1627487190]

Language:

English

Call no.:

A69500/313

Type:

Conference Proceedings

Details

TDL ID:	ZA00053058
Series ID:	PA00000242
Conf. info. (Name):	International Conference on Machinery Electronics and Control Engineering (ICMECE)
Conf. info. (Number):	2nd (2012)
Conf. info. (Venue):	Jinan, Shandong, China
Conf. info. (Date):	2012.12.29-2012.12.30
Note for article:	2nd International Conference on Machinery Electronics and Control Engineering, Jinan, Shandong, China, 29-30 December 2012

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