Taper Angle of Silicon Nitride Thin Film Control by Laser Direct Pattern for Transistors Fabrication

Taper Angle of Silicon Nitride Thin Film Control by Laser Direct Pattern for Transistors Fabrication

Author(s):

Publication title:

Innovation for applied science and technology : selected, peer reviewed papers from the Second International Conference on Engineering and Technology Innovation 2012, November 2-6, 2012, Kaohsiung, Taiwan, R. O. C.

Title of ser.:

Applied mechanics and materials

Ser. no.:

284-287

Pub. Year:

2013

Vol.:

1

Page(from):

225

Page(to):

229

Pages:

5

Pub. info.:

Stafa-Zuerich: Trans Tech Publications

ISSN:

16609336

ISBN:

9781627480550 [1627480552]

Language:

English

Call no.:

A69500/284

Type:

Conference Proceedings

Details

TDL ID:	ZA00053055
Series ID:	PA00000242
Conf. info. (Name):	International Conference on Engineering and Technology Innovation
Conf. info. (Number):	2nd
Conf. info. (Venue):	Kaohsiung, Taiwan, R.O.C.
Conf. info. (Date):	2012.11.02-2012.11.06
Note for article:	2nd International Conference on Engineering and Technology Innovation, Kaohsiung, Taiwan, R.O.C., November 2-6, 2012

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