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Plasma Impedance Tuning Effect on Nanostructure of Diamond Films

Author(s):
Publication title:
Mechatronics, applied mechanics and energy engineering : selected, peer reviewed papers from the 2013 International Conference on Mechatronics, Applied Mechanics and Energy Engineering (MAMEE 2013) : Singapore 27-29 July 2013
Title of ser.:
Applied mechanics and materials
Ser. no.:
394
Pub. Year:
2014
Page(from):
32
Page(to):
37
Pages:
6
Pub. info.:
Stafa-Zuerich: Trans Tech Publications
ISSN:
16609336
ISBN:
9781629936352 [1629936359]
Language:
English
Call no.:
A69500/394
Type:
Conference Proceedings

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