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Properties of Annealed Indium Tin Tantalum Oxide Films Prepared by Reactive Magnetron Sputtering

Author(s):
Zhang, Bo  
Publication title:
Information engineering for mechanics and materials research : selected, peer reviewed papers from the 2013 International Conference on Information Engineering for Mechanics and Materials (ICIMM 2013), July 5-7, 2013, Hangzhou, China
Title of ser.:
Applied mechanics and materials
Ser. no.:
422
Pub. Year:
2013
Page(from):
70
Page(to):
74
Pages:
5
Pub. info.:
Stafa-Zuerich: Trans Tech Publications
ISSN:
16609336
ISBN:
9783037858851 [3037858850]
Language:
English
Call no.:
A69500/422
Type:
Conference Proceedings

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