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HF Vapor Release Assessment to Address NEMS Applications

Author(s):
Publication title:
Microfabricated and Nanofabricated Systems for MEMS/NEMS 8, at 214th ECS Meeting, October 12-17, 2008, Honolulu, Hawaii, USA
Title of ser.:
ECS transactions
Ser. no.:
16(14)
Pub. Year:
2008
Page(from):
37
Page(to):
44
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
19385862
ISBN:
9781605606651 [1605606650]
Language:
English
Call no.:
E23400/16-13 [14]
Type:
Conference Proceedings

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