Low Temperature Deposition of Ge Thin Films for Phase Change Memory

Low Temperature Deposition of Ge Thin Films for Phase Change Memory

Author(s):

Publication title:

Atomic layer deposition applications 3

Title of ser.:

ECS transactions

Ser. no.:

11(7)

Pub. Year:

2007

Page(from):

269

Page(to):

278

Pages:

10

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

19385862

ISBN:

9781566775731 [1566775736]

Language:

English

Call no.:

E23400/11-7

Type:

Conference Proceedings

Details

TDL ID:	ZA00052897
Series ID:	PA00000034
Conf. info. (Name):	Symposium on Atomic Layer Deposition Applications ; Meeting of the Electrochemical Society
Conf. info. (Number):	3rd ; 212th
Conf. info. (Venue):	Washington, DC, USA
Conf. info. (Date):	2007.10.08-2007.10.09
Note for article:	3rd Symposium on Atomic Layer Deposition Applications, 212th Meeting of the Electrochemical Society, Hilton Washington, Washington, DC, October 8-9, 2007

Similar Items:

1 Conference Proceedings CVD of Amorphous GeTe Thin Films Philip S. Chen, William J. Hunks, Matthias Stender, Tianniu Chen, Gregory T. Stauf, Chongying Xu, Jeffrey F. Roeder Materials Research Society	7 Conference Proceedings Low-Temperature Deposition of ZrC Thin Films from a Single-Source Precursor Smith, D.C., Healy, M.D., Rubiano, R.R., Springer, R.W. Electrochemical Society
2 Conference Proceedings Germanium ALD/CVD Precursors for Deposition of Ge/GeTe Films William Hunks, Philip S. Chen, Tianniu Chen, Matthias Stender, Gregory T. Stauf, Leah Maylott, Chongying Xu, Jeffrey F. … Materials Research Society	8 Conference Proceedings Low-Temperature Chemical Vapor Deposition of Titanium Dioxide Thin Films Using Tetranitratotitanium (IV) Gilmer, D. C., Gladfelter, W. L., Colombo, D. G., Taylor, C. J., Roberts, J., Campbell, S. A., Kim, H-S., Wilk, G. D., … MRS - Materials Research Society
3 Conference Proceedings Conformal MOCVD Deposition of GeSbTe in High Aspect Ratio Via Structure for Phase Change Memory Applications Jun-Fei Zheng, Phil Chen, William Hunks, Matthias Stender, Chongying Xu, Weimin Li, Jeff Roeder, Smuruthi Kamepalli, … Materials Research Society	9 Conference Proceedings Properties of Zr-substituted (Ba, Sr)TiO3 thin films for integrated capacitors Stauf, G. T., Chen, P. S., Paw, W., Roeder, J. F., Ayguavives, T., Maria, J-P., Kingon, A. I. MRS-Materials Research Society
4 Conference Proceedings Novel Zirconium Precursors for Atomic Layer Deposition of ZrO2 films T. Chen, T.M. Cameron, S.D. Nguyen, G.T. Stauf, D.W. Peters Electrochemical Society	10 Conference Proceedings LOW TEMPERATURE SYNTHESIS OF CARBIDE THIN FILMS BY PULSED LASER DEPOSITION (PLD) Donley, M. S., Zabinski, J. S., Sessler, W. J., Dyhouse, V. J., Walck, S. D., McDevitt, N. T. Materials Research Society
5 Conference Proceedings Low Temperature Process for High Density Thin Film Integrated Capacitors Hendrix,Bryan C., Stauf,Gregory T. IMAPS, SPIE-The International Society for Optical	11 Conference Proceedings LOW TEMPERATURE SYNTHESIS OF CARBIDE THIN FILMS BY PULSED LASER DEPOSITION (PLD) Donley, M. S., Zabinski, J. S., Sessler, W. J., Dyhouse, V. J., Walck, S. D., McDevitt, N. T. Materials Research Society
6 Conference Proceedings Low Temperature Deposition of Polycrystalline Lithium Transition Metal Oxide Thin Films for Micro Batteries K. Chiu, C. Chen, P. Chen, W. Ho Electrochemical Society	12 Conference Proceedings Chemical Vapor Deposition (CVD) of Iridium and Platinum Films and Gas-Phase Chemical Etching of Iridium Thin Films Xu, C., Dimeo, F., Jr., Baum, T. H., Russell, M. MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12