Amorphous Lanthanum Lutetium Oxide Thin Films as an Alternative High-κ Material

Amorphous Lanthanum Lutetium Oxide Thin Films as an Alternative High-κ Material

Author(s):

Publication title:

Physics and technology of high-k gate dielectrics 5

Title of ser.:

ECS transactions

Ser. no.:

11(4)

Pub. Year:

2007

Page(from):

311

Page(to):

318

Pages:

8

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

19385862

ISBN:

9781566775700 [1566775701]

Language:

English

Call no.:

E23400/11-4

Type:

Conference Proceedings

Details

TDL ID:	ZA00049542
Series ID:	PA00000034
Conf. info. (Name):	International Symposium on High Dielectric Constant Materials and Gate Stacks ; Meeting of the Electrochemical Society
Conf. info. (Number):	5th ; 212th
Conf. info. (Venue):	Washington, D.C., USA
Conf. info. (Date):	2007.10.08-2007.10.10
Note for article:	Fifth International Symposium on High Dielectric Constant Materials and Gate Stacks, held in Washington, DC from October 8 to 10, 200

Similar Items:

1 Conference Proceedings The Formation and Characterisation of Lanthanum Oxide Based Si/High-κ/NiSi Gate Stacks by Electron-Beam Evaporation: An Examination of In-Situ Amorphous … P. Hurley, M. Pijolat, K. Cherkaoui, E. O'Connor, D. O'Connell Electrochemical Society	7 Conference Proceedings Investigation of Conducting Oxide and Metal Electrode Work Functions on Lanthanum Silicate High-κ Dielectric H. Lee, D.J. Lichtenwalner, J.S. Jur, A.I. Kingon Electrochemical Society
2 Conference Proceedings Overview of Materials Processing and Properties of Lanthanum-Based High-κ Dielectrics D.J. Lichtenwalner, J.S. Jur, N. Inoue, A.I. Kingon Electrochemical Society	8 Conference Proceedings Effect of Electrodeposited Thin Films Containing Yttrium on High Temperature Oxidation Behaviour of Ni Base Alloys Brossard, J.M., Balmain, J., Huntz, A.M., Bonnet, G. Trans Tech Publications
3 Conference Proceedings Amorphous Thin Film Ruthenium Oxide as an Electrode Material for Electrochemical Capacitors Jow, T. R., Zheng, J. P. MRS - Materials Research Society	9 Conference Proceedings Thin Films of Amorphous Electrode Materials for Li Microbatteries Ribes, M., Guessous, A., Sarradin, J. Electrochemical Society
4 Conference Proceedings Preparation and Electrochemical Oxidation of Thin Film Lanthanum Cuprate Superconductors Donahue, W.J., Crawford, M.K., Harlow, R.L., Parkinson, B.A. Electrochemical Society	10 Conference Proceedings *POLYSILICON THIN FILMS AND DEVICES PRODUCED BY LOW-TEMPERATURE (600°C) FURNACE CRYSTALLISATION OF HYDROGENATED AMORPHOUS SILICON (a-Si:H) Dyer, T.E., Marshall, J.M., Pickin, W., Hepburn, A.R., Davies, J.F. Materials Research Society
5 Conference Proceedings High Performance ALD Reactor for High-κ Films J. Dalton, H.Y. Kim, Z. Zhang, T. Seidel, Z. Karim Electrochemical Society	11 Conference Proceedings WD3:Examination of tungsten-oxide-based thin films for optical memory Bussjager,R.J., Osman,J.M., Chaiken,J., Getbehead,M.A., Hinkel,D.S., McEwen,T. SPIE - The International Society for Optical Engineering
6 Conference Proceedings Rare-Earth Metal Scandate High-k Layers C. Zhao, T. Heeg, M. Wagner, J. Schubert, S. Witters, B. Brijs, H. Bender, O. Richard, V. Afanas'ev, M. Houssa, M. … Electrochemical Society	12 Conference Proceedings Thin-gate dielectric films grown in N₂O and O₂ using rapid thermal oxidation J.M. Grant, T.-Y. Hsieh, V.L. Shannon Society of Photo-optical Instrumentation Engineers

1

2

3

4

5

6

7

8

9

10

11

12