Transparent Conducting Oxides at High Aspect Ratios by ALD

Transparent Conducting Oxides at High Aspect Ratios by ALD

Author(s):

Publication title:

Atomic layer deposition applications 2

Title of ser.:

ECS transactions

Ser. no.:

3(15)

Pub. Year:

2007

Page(from):

243

Page(to):

247

Pages:

5

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

19385862

ISBN:

9781566775427 [1566775426]

Language:

English

Call no.:

E23400/3-15

Type:

Conference Proceedings

Details

TDL ID:	ZA00047119
Series ID:	PA00000034
Conf. info. (Name):	Symposium on Atomic Layer Deposition Applications ; Meeting of the Electrochemical Society
Conf. info. (Number):	2nd ; 210th
Conf. info. (Venue):	Cancun, Mexico
Conf. info. (Date):	2006.10.29-2006.11.01
Note for article:	2nd Symposium on Atomic Layer Deposition Applications, 210th meeting of the Electrochemical Society, Moon Palace Resort, Cancun, Mexico, October 29 - November 1, 2006

Similar Items:

1 Conference Proceedings Anodic Aluminum Oxide Templated Channel Electrodes via Atomic Layer Deposition A.B. Martinson, J. Elam, J.T.T. Hupp, M. Pellin Electrochemical Society	7 Conference Proceedings Property Control of Transparent Conducting Oxides J.L. Linden, A.M.B. van Mol, C.P.G. Schrauwen, R. Groenen, M.C.M. van de Sanden, A.D. Kuypers Society of Vacuum Coaters
2 Conference Proceedings ALD Capping Layers for Accelerator Superconducting Radio Frequency Cavities M.J. Pellin, J. Elam, J. Moore Electrochemical Society	8 Conference Proceedings High-aspect-ratio integrated force arrays Bobbio,S.M., Smith,S.W., Zara,J.M., Goodwin-Johansson,S.H., Gentry,K.L., Hudak,J.A., Kerns,M., Elliott,P.C., Rouse,B.J., … SPIE-The International Society for Optical Engineering
3 Conference Proceedings Nucleation and Growth of Noble Metals on Oxide Surfaces Using Atomic Layer Deposition J.W. Elam, A.V.V. Zinovev, M.J. Pellin, D.J. Comstock, M.C. Hersam Electrochemical Society	9 Conference Proceedings (755e) Atomic Layer Deposition of the Quaternary Chalcogenide Cu2ZnSnS4 (CZTS) Elijah Thimsen, Shannon Riha, Alex Martinson, Jeffrey Elam, Michael J. Pellin American Institute of Chemical Engineers
4 Conference Proceedings Spatially Controlled Atomic Layer Deposition in Porous Membranes J. Elam, J.A. Libera, P.C. Stair, M.J. Pellin Electrochemical Society	10 Conference Proceedings Applications of CVD Transparent Conducting Oxides Deposited on a Float Glass Manufacturing Line McCurdy, R.J., Soubeyrand, M.J. Electrochemical Society
5 Conference Proceedings (755f) Energy Levels, Electronic Properties, and Rectification in Ultrathin P-NiO Films Synthesized by Atomic Layer Deposition Elijah Thimsen, Alex Martinson, Jeffrey Elam, Michael J. Pellin American Institute of Chemical Engineers	11 Conference Proceedings Metalorganic-Chemical-Vapor-Deposition Routes to Films of Transparent Conducting Oxides Wang, A., Cheng, S. C., Belot, J. A., McNeely, R. J., Cheng, J., Marcordes, B., Marks, T. J., Dai, J. Y., Chang, R. P. … MRS - Materials Research Society
6 Conference Proceedings Photoeffects with Porous Layer-by-Layer Assembled Molecular Films Massari, A. M., Martinson, A., Ahn, S., Hupp, J. T. Electrochemical Society	12 Conference Proceedings Comparison of Bosch and cryogenic processes for patterning high-aspect-ratio features in silicon Walker,M.J. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12