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Optical 3D shape measurement for nano-scale thin film buckling

Author(s):
Publication title:
ICEM 2008 : International Conference on Experimental Mechanics 2008, 8-11 November 2008, Nanjing, China , editors ; Xiaoyuan He, Huimin Xie, Yilan Kang ; organized by the Chinese Society for Experimental Mechanics [and] Southeast University (China) ; sponsored by Asian Committee of Experimental Mechanics [and] the Chinese Society of Theoretical and Applied Mechanics ; cosponsored by Ministry of Education of China ... [et al.] ; cooperating organization, SPIE.
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7375
Pub. Year:
2009
Vol.:
2
Page(from):
73755L-1
Page(to):
73755L-6
Pages:
6
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819476517 [081947651X]
Language:
English
Call no.:
P63600/7375
Type:
Conference Proceedings

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