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Near-field diffraction simulation on three-dimensional mask model with off-axis illumination

Author(s):
Publication title:
Design, manufacturing, and testing of micro- and nano-optical devices and systems : 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies : 19-21 November 2008, Chengdu, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7284
Pub. Year:
2009
Page(from):
728418-1
Page(to):
728418-7
Pages:
7
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819475442 [0819475440]
Language:
English
Call no.:
P63600/7284
Type:
Conference Proceedings

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