Research on digital gray-tone projection lithography
- Author(s):
- Publication title:
- Design, manufacturing, and testing of micro- and nano-optical devices and systems : 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies : 19-21 November 2008, Chengdu, China
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 7284
- Pub. Year:
- 2009
- Page(from):
- 728417-1
- Page(to):
- 728417-4
- Pages:
- 4
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819475442 [0819475440]
- Language:
- English
- Call no.:
- P63600/7284
- Type:
- Conference Proceedings
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