Research on vibration cancellation interferometric measurements of surface profile with nanometer accuracy

Research on vibration cancellation interferometric measurements of surface profile with nanometer accuracy

Author(s):

H. Jiang ( Chongqing Technology and Business Univ., China )
G. He ( Chongqing Normal Univ., China )

Publication title:

4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

7283

Pub. Year:

2009

Vol.:

1

Page(from):

72831O-1

Page(to):

72831O-6

Pages:

6

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819475435 [0819475432]

Language:

English

Call no.:

P63600/7283

Type:

Conference Proceedings

Details

TDL ID:	ZA00052804
Series ID:	PA00000029
Conf. info. (Name):	International Symposium on Advanced Optical Manufacturing and Testing Technologies
Conf. info. (Number):	2008 : 4th
Conf. info. (Venue):	Chengdu, China
Conf. info. (Date):	2008.11.19-2008.11.21
Note for article:	4th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 19-21 November 2008, Chengdu, China - Poster Session, 72831O, 7283-59

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