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Effects of thickness and substrate temperature on the electrical and optical properties of In2O3-Zn0 films

Author(s):
  • Y. Pei ( Fujian Normal Univ., China )
  • F. Lai ( Fujian Normal Univ., China )
  • L. Lin ( Fujian Normal Univ., China )
  • L. Fan ( Fujian Normal Univ., China )
  • Y. Qu ( Fujian Normal Univ., China )
Publication title:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7282
Pub. Year:
2009
Vol.:
1
Page(from):
728215-1
Page(to):
728215-6
Pages:
6
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819475428 [0819475424]
Language:
English
Call no.:
P63600/7282
Type:
Conference Proceedings

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