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Capillary Z-pinch discharge produced plasma EUV source

Author(s):
  • Y. Zhao ( Harbin Institute of Technology, China )
  • Q. Xu ( Harbin Institute of Technology, China )
  • X. Zhang ( Harbin Institute of Technology, China )
  • P. Lv ( Harbin Institute of Technology, China )
  • Q. Wang ( Harbin Institute of Technology, China )
Publication title:
Photonics and Optoelectronics Meetings (POEM) 2008 : laser technology and applications : 24-27 November 2008 Wuhan, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7276
Pub. Year:
2009
Page(from):
72761J-1
Page(to):
72761J-7
Pages:
7
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819475350 [0819475351]
Language:
English
Call no.:
P63600/7276
Type:
Conference Proceedings

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