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A fast and high resolution x-ray imaging sensor for tape substrate inspection

Author(s):
Publication title:
Optomechatronic technologies 2008 : 17-19 November 2008, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7266
Pub. Year:
2008
Pt.:
B
Page(from):
72660Q-1
Page(to):
72660Q-8
Pages:
8
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819475183 [0819475181]
Language:
English
Call no.:
P63600/7266
Type:
Conference Proceedings

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