A high precision metrology method and system for thin film's parameters based on reflectance spectrum

Author(s):

• Z. Dai ( Univ. of Electronic Science and Technology of China, China )
• Z. Peng ( Univ. of Electronic Science and Technology of China, China )
• Z. Ou ( Univ. of Electronic Science and Technology of China, China )
• Y. Liu ( Univ. of Electronic Science and Technology of China, China )
• L. Zhang ( Univ. of Electronic Science and Technology of China, China )

Publication title:

Optoelectronic measurement technology and applications : 2008 International Conference on Optical Instruments and Technology : 16-19 November 2008, Beijing, China

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

7160

Pub. Year:

2009

Page(from):

71602P-1

Page(to):

71602P-6

Pages:

6

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819474049 [0819474045]

Language:

English

Call no.:

P63600/7160

Type:

Conference Proceedings