Blank Cover Image

A novel resonant pressure sensor with boron diffused silicon resonator

Author(s):
  • J. Wang ( Institute of Electronics, China )
  • X. Shi ( Institute of Electronics, China )
  • L. Liu ( Institute of Electronics, China )
  • Z. Wu ( Institute of Electronics, China )
  • D. Chen ( Institute of Electronics, China )
Publication title:
MEMS/NEMS technology and applications : 2008 International Conference on Optical Instruments and Technology : 16-19 November 2008, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7159
Pub. Year:
2009
Page(from):
71590C-1
Page(to):
71590C-8
Pages:
8
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819474032 [0819474037]
Language:
English
Call no.:
P63600/7159
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Optimization of a novel structure for micromachined resonant pressure sensor

X. Shi, D. Chen, J. Wang, Z. Wu

Society of Photo-optical Instrumentation Engineers
7 Conference Proceedings Design and modeling of a silicon resonant pressure sensor

Cui,Z., Chen,D., Xia,S.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings FEA modeling of a thermally excited silicon-beam resonant pressure sensor

Chen,D., Cui,D., Wang,L., Yu,Z., Cui,Z., Xia,S.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Pressure sensor based on a microstructure with dual silicon nitride vibrating beams

Chen, D.Y., Cui, D.F., Wang, L., Gao, X.T., Fan, Z.Y.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Vacuum Adhesive Bonding and Stress Isolation for MEMS Resonant Pressure Sensor Package

Y.X. Li, D.Y. Chen, J.B. Wang

Trans Tech Publications
9 Conference Proceedings Novel vapor sensor based on chemical coupling effect of composite

Chen,X., Yang,D., Jiang,Y., Wu,Z., Wang,S., Li,D.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Numerical modeling of a SiN beam resonant pressure sensor

Chen, D., Cui, D., Wang, L., Yu, Z.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Optical micro-resonator chemical sensor

A. Pyayt, X. Zhang, J. Luo, A. Jen, L. Dalton, A. Chen

SPIE - The International Society of Optical Engineering
5 Conference Proceedings Thermally excited SiN beam resonant pressure sensor

Chen,D., Cui,D., Yu,Z., Wang,L., Cui,Z., Xia,S.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings A novel optical MEMS pressure sensor with a mesa diaphragm

Y. Ge, M. Wang, H. Rong, X. Chen

Society of Photo-optical Instrumentation Engineers
6 Conference Proceedings A Novel TiO2 Film Catalyst-Preparation, Properties and Research on Its Photocatalytic Oxidized Activity

Cao, Y. A., Zhang, X. T., Chong, L. Q., Wang, D. Y., Xie, T. F., Huang, Y., Cui, Z. F., Shi, W. G., Liu, X. J., Wu, Z. …

MRS - Materials Research Society
12 Conference Proceedings Growth and characterization of boron delta function shaped doping layer in silicon by molecular beam epitaxy

X.J. Chen, Q.H. Wang, D.W. Gong, Y. Yang, H.Q. Lü

Society of Photo-optical Instrumentation Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12