A study of Hg1-xCdxTe surfaces processed using inductively coupled plasma with CH4/H2/N2/Ar mixture

A study of Hg_1-xCd_xTe surfaces processed using inductively coupled plasma with CH₄/H₂/N₂/Ar mixture

Author(s):

W. Zhou ( Shanghai Institute of Technical Physics, China )
Z. Ye ( Shanghai Institute of Technical Physics, China )
X. Hu ( Shanghai Institute of Technical Physics, China )
R. Ding ( Shanghai Institute of Technical Physics, China )
L. He ( Shanghai Institute of Technical Physics, China )

Publication title:

Microelectronic and optoelectronic devices and integration : 2008 International Conference on Optical Instruments and Technology : 16-19 November 2008, Beijing, China

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

7158

Pub. Year:

2009

Page(from):

71581B-1

Page(to):

71581B-8

Pages:

8

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819474025 [0819474029]

Language:

English

Call no.:

P63600/7158

Type:

Conference Proceedings

Details

TDL ID:	ZA00052789
Series ID:	PA00000029
Conf. info. (Name):	International Conference on Optical Instruments and Technology
Conf. info. (Number):	2008
Conf. info. (Venue):	Beijing, China
Conf. info. (Date):	2008.11.16-2008.11.19
Note for article:	2008 International Conference on Optical Instruments and Technology, 16-19 November 2008, Beijing, China - Poster Session, 71581B, 7158-40

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