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Vibration influence and error compensation of aspherical surface interferometer

Author(s):
  • H. Wang ( Xi'an Technological Univ., China )
  • J. Cao ( Xi'an Thermal Power Research Institute, China )
  • A. Tian ( Xi'an Technological Univ., China )
  • B. Liu ( Xi'an Technological Univ., China )
Publication title:
Ninth International Symposium on Laser Metrology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7155
Pub. Year:
2008
Vol.:
2
Page(from):
71552V-1
Page(to):
71552V-8
Pages:
8
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819473981 [0819473987]
Language:
English
Call no.:
P63600/7155
Type:
Conference Proceedings

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