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Structure measurement of phase grating on post-magnification digital micro-holography

Author(s):
  • W. Zhou ( Shanghai Univ., China )
  • Y. Yu ( Shanghai Univ., China )
  • A. Asundi ( Nanyang Technological Univ., Singapore )
Publication title:
Ninth International Symposium on Laser Metrology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7155
Pub. Year:
2008
Vol.:
1
Page(from):
71550A-1
Page(to):
71550A-9
Pages:
9
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819473981 [0819473987]
Language:
English
Call no.:
P63600/7155
Type:
Conference Proceedings

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