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CD control enhancement by laser bandwidth stabilization for advanced lithography application

Author(s):
  • R. C. Peng ( Taiwan Semiconductor Manufacturing Corp., Taiwan )
  • T. Wu ( Taiwan Semiconductor Manufacturing Corp., Taiwan )
  • K. W. Chang ( Taiwan Semiconductor Manufacturing Corp., Taiwan )
  • C. P. Yeh ( Taiwan Semiconductor Manufacturing Corp., Taiwan )
  • H. H. Liu ( Taiwan Semiconductor Manufacturing Corp., Taiwan )
Publication title:
Lithography Asia 2008
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7140
Pub. Year:
2008
Vol.:
2
Page(from):
714041-1
Page(to):
714041-9
Pages:
9
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819473813 [0819473812]
Language:
English
Call no.:
P63600/7140
Type:
Conference Proceedings

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