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The APC (Advanced Process Control) procedure for process window and CDU improvement using DBMs

Author(s):
  • J. Kim ( Hynix Semiconductor Inc., Republic of Korea )
  • T. Lee ( Hynix Semiconductor Inc., Republic of Korea )
  • A. Jung ( Hynix Semiconductor Inc., Republic of Korea )
  • G. Yoo ( Hynix Semiconductor Inc., Republic of Korea )
  • H. Yang ( Hynix Semiconductor Inc., Republic of Korea )
Publication title:
Lithography Asia 2008
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7140
Pub. Year:
2008
Vol.:
2
Page(from):
71403G-1
Page(to):
71403G-11
Pages:
11
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819473813 [0819473812]
Language:
English
Call no.:
P63600/7140
Type:
Conference Proceedings

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