Optimization of optical properties of silicon-based anti-reflective spin-on hardmask materials
- Author(s):
- S. K. Kim ( SAMSUNG Cheil Industries, Inc., Republic of Korea )
- H. M. Cho ( SAMSUNG Cheil Industries, Inc., Republic of Korea )
- C. Woo ( SAMSUNG Cheil Industries, Inc., Republic of Korea )
- S. R. Koh ( SAMSUNG Cheil Industries, Inc., Republic of Korea )
- M. Kim ( SAMSUNG Cheil Industries, Inc., Republic of Korea )
- Publication title:
- Lithography Asia 2008
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 7140
- Pub. Year:
- 2008
- Vol.:
- 2
- Page(from):
- 71402V-1
- Page(to):
- 71402V-7
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819473813 [0819473812]
- Language:
- English
- Call no.:
- P63600/7140
- Type:
- Conference Proceedings
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