Cluster optimization to improve CD control as an enabler for double patterning

Cluster optimization to improve CD control as an enabler for double patterning

Author(s):

L. Tedeschi ( Sokuda Co., Ltd., United States )
C. Rosslee ( Sokuda Co., Ltd., United States )
D. Laidler ( IMEC, Belgium )
P. Leray ( IMEC, Belgium )
K. D'havé ( IMEC, Belgium )

Publication title:

Lithography Asia 2008

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

7140

Pub. Year:

2008

Vol.:

2

Page(from):

714023-1

Page(to):

714023-8

Pages:

8

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819473813 [0819473812]

Language:

English

Call no.:

P63600/7140

Type:

Conference Proceedings

Details

TDL ID:	ZA00052771
Series ID:	PA00000029
Conf. info. (Name):	Lithography Asia
Conf. info. (Number):	2008
Conf. info. (Venue):	Taipei, Taiwan
Conf. info. (Date):	2008.11.04-2008.11.06
Note for article:	Lithography Asia 2008, 4-6 November 2008, Taipei, Taiwan - Optical (DPT Process), 714023, 7140-74

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