Laser-produced plasma source system development

Laser-produced plasma source system development

Author(s):

D. C. Brandt ( Cymer, Inc., United States )
I. V. Fomenkov ( Cymer, Inc., United States )
A. I. Ershov ( Cymer, Inc., United States )
W. N. Partlo ( Cymer, Inc., United States )
D. W. Myers ( Cymer, Inc., United States )

Publication title:

Lithography Asia 2008

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

7140

Pub. Year:

2008

Vol.:

1

Page(from):

71401E-1

Page(to):

71401E-12

Pages:

12

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819473813 [0819473812]

Language:

English

Call no.:

P63600/7140

Type:

Conference Proceedings

Details

TDL ID:	ZA00052771
Series ID:	PA00000029
Conf. info. (Name):	Lithography Asia
Conf. info. (Number):	2008
Conf. info. (Venue):	Taipei, Taiwan
Conf. info. (Date):	2008.11.04-2008.11.06
Note for article:	Lithography Asia 2008, 4-6 November 2008, Taipei, Taiwan - EUV Scanner and Sources, 71401E, 7140-49

Similar Items:

1 Conference Proceedings Laser-produced plasma source system development I. V. Fomenkov, D. C. Brandt, A. N. Bykanov, A. I. Ershov, W. N. Partlo, D. W. Myers, N. R. Bowering, G. O. Vaschenko, … SPIE - The International Society of Optical Engineering	7 Conference Proceedings LPP EUV source developmentfor HVM [6151-26] Hansson, B. A. M., Fomenkov, I. V., Bowering, N. R., Ershov, A.. I., Partio, W. N, Myers, D. W., Khodykin,O.V., … SPIE - The International Society of Optical Engineering
2 Conference Proceedings LPP EUV source development for HVM D. C. Brandt, I. V. Fomenkov, A. I. Ershov, W. N. Partlo, D. W. Myers, N. R. Bowering, A. N. Bykanov, G. O. Vaschenko, … SPIE - The International Society of Optical Engineering	8 Conference Proceedings EUV focus sensor: design and modeling Hoffman, J. R., Bykanov, A. N., Khodykin, O. V., Ershov, A. I., Bowering, N. R., Fomenkov, I. V., Partlo, W. N., Myers, … SPIE - The International Society of Optical Engineering
3 Conference Proceedings EUV source collector [6151-131] Bowering N R, Ershov A I, Marx W F, Khodykin O V, Hansson B A M, Vargas E, Chavez L J A, Fomenkov I V, Myers D W, Brandt … SPIE - The International Society of Optical Engineering	9 Conference Proceedings EUV(13.5-nm)light generation using a dense plasma focus device Partlo,W.N., Fomenkov,I.V., Birx,D.L. SPIE - The International Society for Optical Engineering
4 Conference Proceedings Feasibility studies of operating KrF lasers at ultranarrow spectral bandwidths for 0.18-ｦﾌm line widths Ershov,A.I., Hofmann,T., Partlo,W.N., Fomenkov,I.V., Everage,G., Das,P.P., Myers,D. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Zone-plate-array lithography (ZPAL): optical maskless lithography for cost-effective patterning Rettig, C. L., Khodykin, O. V., Hoffman, J. R., Marx, W. F., Bowering, N. R., Vargas, E., Ershov, A. I., Fomenkov, I. … SPIE - The International Society of Optical Engineering
5 Conference Proceedings Development of an EUV(13.5 nm)light source employing a dense plasma focus in lithium vapor Partlo,W.N., Fomenkov,I.V., Oliver,R., Birx,D.L. SPIE - The International Society for Optical Engineering	11 Conference Proceedings Characterization of flare on Intel's EUV MET Fleurov, V. B., Oh, P. C., Steiger, T. D., Fomenkov, I. V., Partlo, W. N. SPIE - The International Society of Optical Engineering
6 Conference Proceedings High-power low cost drive laser for LPP source [6151-137] Fomenkov, I V., Hanssaon, B. A. M., Boering, N. R., Ershov, A. I., Partlo, W. N., Fleurov, V. B., Khodykin, O. V., … SPIE - The International Society of Optical Engineering	12 Conference Proceedings Optimization of a dense plasma focus device as a light source for EUV lithography Fomenkov, I.V., Partlo, W.N., Ness, R.M., Oliver, I.R., Melnychuk, S.T., Khodykin, O.V., Boewering, N.R. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12