Nanometer-scale manipulator and ultrasonic cutter using an atomic force microscope controlled by a haptic device

Nanometer-scale manipulator and ultrasonic cutter using an atomic force microscope controlled by a haptic device

Author(s):

F. Iwata ( Shizuoka Univ., Japan )
S. Kawanishi ( Shizuoka Univ., Japan )
A. Sasaki ( Shizuoka Univ., Japan )
H. Aoyama ( The Univ. of Electro-Communications, Japan )
T. Ushiki ( Niigata Univ., Japan )

Publication title:

Fifth International Symposium on Instrumentation Science and Technology

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

7133

Pub. Year:

2008

Vol.:

2

Page(from):

71334E-1

Page(to):

71334E-7

Pages:

7

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819473677 [0819473677]

Language:

English

Call no.:

P63600/7133

Type:

Conference Proceedings

Details

TDL ID:	ZA00052764
Series ID:	PA00000029
Conf. info. (Name):	International Symposium on Instrumentation Science and Technology
Conf. info. (Number):	2008 : 5th
Conf. info. (Venue):	Shenyang, China
Conf. info. (Date):	2008.09.15-2008.09.18
Note for article:	5th International Symposium on Instrumentation Science and Technology, 15-18 September 2008, Shenyang, China - Session 10. Nanotechnology and MEMS, 71334E, 7133-960

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