Nanometric edge profile measurement of cutting tools on a diamond turning machine

Author(s):

• T. Asai ( Tohoku Univ., Japan )
• Y. Arai ( Tohoku Univ., Japan )
• Y. Cui ( Tohoku Univ., Japan )
• W. Gao ( Tohoku Univ., Japan )

Publication title:

Fifth International Symposium on Instrumentation Science and Technology

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

7133

Pub. Year:

2008

Vol.:

1

Page(from):

713314-1

Page(to):

713314-6

Pages:

6

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819473677 [0819473677]

Language:

English

Call no.:

P63600/7133

Type:

Conference Proceedings