Laser micro/nanoprocessing for functional electronics

Laser micro/nanoprocessing for functional electronics

Author(s):

S. H. Ko ( Berkeley, United States )
H. Pan ( Berkeley, United States )
C. P. Grigoropoulos ( Univ. of California, Berkeley, United States )

Publication title:

XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers : 15-19 September 2008, Lisboa, Portugal

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

7131

Pub. Year:

2008

Page(from):

71311S-1

Page(to):

71311S-9

Pages:

9

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819473653 [0819473650]

Language:

English

Call no.:

P63600/7131

Type:

Conference Proceedings

Details

TDL ID:	ZA00052762
Series ID:	PA00000029
Conf. info. (Name):	International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
Conf. info. (Number):	2008 : 17th
Conf. info. (Venue):	Lisboa, Portugal
Conf. info. (Date):	2008.09.15-2008.09.19
Note for article:	17th International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 15-19 September 2008, Lisboa, Portugal - Micro- and Nanofabrication, Invited paper, 71311S, 7131-16

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