Automatic leveling procedure by use of the spring method in measurement of three dimensional surface roughness

Automatic leveling procedure by use of the spring method in measurement of three dimensional surface roughness

Author(s):

S. Kurokawa ( Kyushu Univ., Japan )
Y. Ariura ( Kyushu Univ., Japan )
T. Yamamoto ( Kyushu Univ., Japan )

Publication title:

Fourth International Symposium on Precision Mechanical Measurements

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

7130

Pub. Year:

2008

Vol.:

1

Page(from):

71301I-1

Page(to):

71301I-7

Pages:

7

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819473646 [0819473642]

Language:

English

Call no.:

P63600/7130

Type:

Conference Proceedings

Details

TDL ID:	ZA00052761
Series ID:	PA00000029
Conf. info. (Name):	International Symposium on Precision Mechanical Measurements
Conf. info. (Number):	2008 : 4th
Conf. info. (Venue):	Hefei/Jiuhua Mountain, Anhui, China
Conf. info. (Date):	2008.08.25-2008.08.29
Note for article:	4th International Symposium on Precision Mechanical Measurements, 25-29 August 2008, Hefei/Jiuhua Mountain, Anhui, China - Session 6. Online Automatic Measurement and Control, 71301I, 7130-53

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