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Optimum design of 2D micro-angle sensor

Author(s):
  • Q. Liu ( Tianjin Univ., China )
  • H. Zhao ( Tianjin Univ., China )
  • X. Lou ( Tianjin Univ., China )
  • N. Jiang ( Tianjin Univ., China )
  • X. Hu ( Tianjin Univ., China )
Publication title:
Fourth International Symposium on Precision Mechanical Measurements
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7130
Pub. Year:
2008
Vol.:
1
Page(from):
713009-1
Page(to):
713009-6
Pages:
6
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819473646 [0819473642]
Language:
English
Call no.:
P63600/7130
Type:
Conference Proceedings

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