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Study on digital closed-loop system of silicon resonant micro-sensor

Author(s):
  • Y. Xu ( Beihang Univ., China )
  • M. He ( Beihang Univ., China )
Publication title:
Sensors and instruments, computer simulation, and artificial intelligence : Seventh International Symposium on Instrumentation and Control Technology : 10-13 October, 2008, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7127
Pub. Year:
2008
Page(from):
71270W-1
Page(to):
71270W-6
Pages:
6
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819473615 [0819473618]
Language:
English
Call no.:
P63600/7127
Type:
Conference Proceedings

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