Mask process monitoring with optical CD measurements for sub-50-nm
- Author(s):
- K.-Y. Bang ( SAMSUNG Electronics Co., Ltd., Republic of Korea )
- J.-B. Park ( SAMSUNG Electronics Co., Ltd., Republic of Korea )
- J.-H. Roh ( SAMSUNG Electronics Co., Ltd., Republic of Korea )
- D.-H. Chung ( SAMSUNG Electronics Co., Ltd., Republic of Korea )
- S.-Y. Cho ( SAMSUNG Electronics Co., Ltd., Republic of Korea )
- Publication title:
- Photomask technology 2008
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 7122
- Pub. Year:
- 2008
- Vol.:
- 2
- Page(from):
- 71222V-1
- Page(to):
- 71222V-8
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819473554 [0819473553]
- Language:
- English
- Call no.:
- P63600/7122
- Type:
- Conference Proceedings
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