Design for manufacturability guideline development: integrated foundry approach

Design for manufacturability guideline development: integrated foundry approach

Author(s):

H. Lee ( Dongbu HiTek, Republic of Korea )
Y.-A. Shim ( Dongbu HiTek, Republic of Korea )
J.-Y. Choi ( Dongbu HiTek, Republic of Korea )
K.-S. Choi ( Dongbu HiTek, Republic of Korea )
J. Wu ( Anchor Semiconductor, Inc., United States )

Publication title:

Photomask technology 2008

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

7122

Pub. Year:

2008

Vol.:

1

Page(from):

712221-1

Page(to):

712221-9

Pages:

9

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819473554 [0819473553]

Language:

English

Call no.:

P63600/7122

Type:

Conference Proceedings

Details

TDL ID:	ZA00052753
Series ID:	PA00000029
Conf. info. (Name):	SPIE Photomask Technology : Annual BACUS Symposium on Photomask Technology
Conf. info. (Number):	2008 : 28th
Conf. info. (Venue):	Monterey, California, USA
Conf. info. (Date):	2008.10.07-2008.10.10
Note for article:	Photomask technology 2008, 7-10 October 2008, Monterey, California, USA - Session 16. DFM, 712221, 7122-73

Similar Items:

1 Conference Proceedings Design Sensitivity Analysis of Dynamic Frequency Responses of Acousto-Elastic Built-Up Structures Choi K. K., Shim I., Lee J., Kulkarni T. H. Kluwer Academic Publishers	7 Conference Proceedings A Design of Manufacturing Processes for Valve-Spring Retainer Component Ko, B. D., Choi, H. J., Hwang, B. B., Kim, S. H., Hwang, S. K. Trans Tech Publications
2 Conference Proceedings Development of Miniaturized Micro Metal Forming Manufacturing System H.J. Lee, N.K. Lee, S.G. Choi Trans Tech Publications	8 Conference Proceedings Design of Manufacturing Process of Oxygen-Free High Conductivity Copper Using Mahalanobis-Distance Outlier Detection Method J.I. Lee, J.H. Lee, S.H. Park, H.S. Choi, H. Cho, H.H. Jo, S.K. Kim, H.C. Kwon, J.E. Hong Trans Tech Publications
3 Conference Proceedings Development of mask-making process for CLM manufacturing technology Park, J.-H., Chung, D.-H., Lee, M.-K., Shin, I.-K., Choi, S.-W., Yoon, H.-S., Sohn, J.-M., Chen, J.F., Van Den Broeke, … SPIE-The International Society for Optical Engineering	9 Conference Proceedings Development of Micro Metal Forming Manufacturing System Lee, H.J., Lee, N.K., Lee, S.M., Lee, G.A., Kim, S.S. Trans Tech Publications
4 Conference Proceedings Integrated system approach at GIST/ADEMRC for monitoring atmospheric environment Kim, Y.J., Noh, Y.M., Choi, S.C., Lee, C.K., Jung, J.S., Lee, H.L., Kim, J.E., Kim, K.W., Kim, M.J., He, Z., Ogunjobi, … SPIE - The International Society of Optical Engineering	10 Conference Proceedings An Integrated Approach to Structural Composite Manufacturing Lee, C., Castro, J. American Institute of Chemical Engineers
5 Conference Proceedings Development of Manufacturing Process Using Cold Incremental Forming Technique for Micro-Alloyed Non-Heat-Treated Material Lee, H.W., Lee, G.A., Yoon, D.J., Choi, S., Lee, N.K., Lee, H.J., Bae, S.M. Trans Tech Publications	11 Conference Proceedings Integrated Database Development for Casting Design and its Application to Casting Simulation I.S. Cho, J.T. Kim, J.K. Choi Trans Tech Publications
6 Conference Proceedings Mask process variation induced OPC accuracy in sub-90 nm technology node [6154-138] Park, S.J., Shim, Y.A., Kang, J.H., Choi,J Y, Yoon K H, Lee Y S, Kim K SPIE - The International Society of Optical Engineering	12 Conference Proceedings Low-cost integrated-optic fiber couplers Sheem,S.K., Zhang,F., Choi,J.-H., Lee,Y.-W., Low,S., Lu,S.-Y. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12