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New developments in magnetron sputter processes for precision optics

Author(s):
  • M. Vergöhl ( Fraunhofer Institute for Surface Engineering and Thin Films, Germany )
  • O. Werner ( Fraunhofer Institute for Surface Engineering and Thin Films, Germany )
  • S. Bruns ( Fraunhofer Institute for Surface Engineering and Thin Films, Germany )
Publication title:
Advances in optical thin films III : 2-3 September 2008, Glasgow, United Kingdom
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7101
Pub. Year:
2008
Page(from):
71010B-1
Page(to):
71010B-17
Pages:
17
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819473318 [0819473316]
Language:
English
Call no.:
P63600/7101
Type:
Conference Proceedings

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