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Fast three-dimensional shape recovery in TFT-LCD manufacturing

Author(s):
  • W.-J. Choi ( Gwangju Institute of Science and Technology, Korea, Republic of )
  • T.-S. Choi ( Gwangju Institute of Science and Technology, Korea, Republic of )
Publication title:
Applications of digital image processing XXXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7073
Pub. Year:
2008
Page(from):
70731U-1
Page(to):
70731U-8
Pages:
8
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819472939 [081947293X]
Language:
English
Call no.:
P63600/7073
Type:
Conference Proceedings

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