Closed-loop high-precision position control system with two modes
- Author(s):
- Publication title:
- Optical system alignment and tolerancing II : 10-11 August 2008, San Diego, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 7068
- Pub. Year:
- 2008
- Page(from):
- 70680O-1
- Page(to):
- 70680O-8
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819472885 [0819472883]
- Language:
- English
- Call no.:
- P63600/7068
- Type:
- Conference Proceedings
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